TMA Trimethylaluminum
Classification:
- Description
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Trimethylaluminum
Trimethylaluminum (TMA) is a liquid aluminum source used in ALD/PEVCD/MOCVD processes, primarily for depositing aluminum oxide layers, aluminum nitride, and compound semiconductor materials such as AlGaAs and InAlAs. It is used in the semiconductor manufacturing process for DRAM capacitor dielectrics, high-k gate dielectrics; in the solar cell and OLED manufacturing process for silicon surface passivation layers; and in OLED film packaging for moisture barrier film coatings and gas diffusion barrier films.
■ Physical and Chemical Properties
Molecular Formula (CH3)3Al Molecular Weight 72.09 g/mol Melting Point 15℃ Boiling Point 127.12 ℃ Vapor Pressure 9mmHg (20℃) Density 0.752 g/ml Appearance Colorless liquid CAS 75-24-1 ■ Hazardous Properties
Hazard Characteristics Description Pictogram Trimethylaluminum is a flammable liquid that ignites spontaneously when exposed to air. It releases flammable gas that can ignite upon contact with water. It reacts violently with water. 
■ Quality Indicators
Analysis Items Technical Index Analysis Items Technical Index 5N 6N 5N 6N Silver (Ag), max 0.4 ppm 10 ppb Lithium (Li), max 0.1 ppm 5 ppb Arsenic (As), max 0.5 ppm 10 ppb Magnesium (Mg), max 0.05 ppm 10 ppb Boron (B), max 0.4 ppm 10 ppb Manganese (Mn), max 0.05 ppm 10 ppb Barium (Ba), max 0.1 ppm 10 ppb Sodium (Na), max 0.5 ppm 20 ppb Beryllium (Be), max 0.2 ppm 5 ppb Nickel (Ni), max 0.4 ppm 20 ppb Bismuth (Bi), max 0.2 ppm 5 ppb Lead (Pb), max 1 ppm 10 ppb Calcium (Ca), max 0.1 ppm 10 ppb Selenium (Se), max 1 ppm 10 ppb Cadmium (Cd), max 0.1 ppm 10 ppb Silicon (Si), max 1 ppm 20 ppb Cobalt (Co), max 0.1 ppm 10 ppb Tin (Sn), max 0.1 ppm 10 ppb Chromium (Cr), max 0.1 ppm 20 ppb Tellurium (Te), max 0.1 ppm 10 ppb Copper (Cu), max 0.15 ppm 20 ppb Titanium (Ti), max 0.1 ppm 50 ppb Iron (Fe), max 0.1 ppm 50 ppb Vanadium (V), max 0.2 ppm 50 ppb Gallium (Ga), max 0.2 ppm 50 ppb Zinc (Zn), max 0.2 ppm 50 ppb Germanium (Ge), max 0.1 ppm 50 ppb Zirconium (Zr), max 0.2 ppm 50 ppb Mercury (Hg), max 0.1 ppm 10 ppb Shelf Life 36 months 36 months Potassium (K), max 1 ppm 10 ppb / ■ Packaging Specification
2.41kg/14.2kg/72kg/300kg
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